marco marengo university of bergamo micro heat exchangers technical characteristics production and market l cassia d a di pietro m università degli studi microscale transfer frontiera ricerca problemi sviluppo e applicazione roma 25 ottobre 2002 contents checkbld introduction sinks working principle mhe hs fabrication techniques microsystems technology with increasing power the new generations ic vlsi components bring challenge in removal every 10 c increase junction temperature reduces semiconductor life by 50 cooling methods head2right natural convection low dissipration rate forced commonly used pc other indirect liquid cold plate high end computer supercomputer directed dielectric equipments phase change materials pipe systems for notebook sink finned devices h s status art enormous number information papers patents 300 prototypes enhancement is obtained through exchange coefficient decreasing channels hydraulic diameter