1 introduction to microeletromechanical systems mems edward s kolesar ph d pe wa moncrief professor of engineering texas christian university department frank l lewis o donnell endowed chair the at arlington electrical automation and robotics institute arri ed acknowledgements instructors acknowledge support course materials made available by following individuals organizations either personally or via their web sites karl bohringer washington gregory kovacs stanford kris pister california berkeley martin schmidt mit ken wise michigan 2 administrative topics syllabus schedule homework project handouts set crystal silicon origami richard feynman article kurt petersen overview microelectromechanical history scale surface bulk micromachining fabrication techniques for lithography deposition etching micro hinges scream hexsil liga foundries mcnc mumps mosis cmos transducers mechanical optical thermal electrostatic modeling simulation special current research 3
