approved for public release distribution unlimited memsmto darpa a vision of the future mems albert al p pisano ph d program manager microsystems technology office defense advanced research projects agency 703 696 2278 apisano mil http www mto 2003 and beyond darpawhat are n way making things l leverage on existing infrastructure ic fabrication tools prototype mass production co location sense compute actuate control communicate power increase performance decrease cost integrate an increased number technologies closed loop microscale electrical thermal fluid magnetic optical flux is surface phenomena cause large effects both macroscale high spatial resolution temporal bandwidth integrated solutions offer greater physical density miniaturized components faster response at array chip islands macro platform dual scale interconnect problem
